Advanced Energy Unveils Centra Smart Hub for Improved Temperature Measurement
Advanced Energy Industries Inc. (AEIS), a global leader in precision power conversion, measurement, and control solutions, has launched the new Centra Smart Hub. This innovative product, paired with Advanced Energy’s new Remote Smart Sensors (RSS), is designed to enhance temperature-measurement capabilities in next-generation semiconductor equipment.
The Centra Smart Hub serves as a central hub, supporting up to eight sensors for precise, repeatable, non-contact temperature measurement, especially in space-constrained semiconductor environments. It addresses critical needs in lamp-heated Si and SiC thermal processes, such as rapid thermal annealing (RTA) and epitaxial (Epi) growth, by enabling more accurate wafer-temperature measurement and real-time temperature control.
A key differentiator of the Centra Smart Hub is its industry-leading performance, offering up to a 40% improvement in accuracy over other standard solutions when measuring at either 3.3 um or 5.2 um and at temperatures up to 1700°C. This advancement is crucial for new and emerging semiconductor manufacturing processes, contributing to increased throughput, improved process uniformity, and higher product quality. The system's architecture is optimized for semiconductor chambers, and it integrates embedded ECAT and Ethernet protocols for seamless system integration.
Source Link: Press Release
Specifications
| Product | Function | Supported Sensors | Accuracy Improvement | Measurement Range (Temp) | Measurement Wavelengths | Protocols | RSS Ambient Temp |
|---|---|---|---|---|---|---|---|
| Centra Smart Hub | Centralized Temperature Measurement Hub | Up to eight Remote Smart Sensors | Up to 40% over standard solutions | Up to 1700°C | 3.3 um or 5.2 um | ECAT, Ethernet | Up to 60°C |
Key Features
- Supports up to eight Remote Smart Sensors (RSS) for comprehensive coverage.
- Enables precise, repeatable, non-contact temperature measurement.
- Delivers industry-leading performance with up to a 40% accuracy improvement over standard solutions.
- Capable of measuring temperatures up to 1700°C.
- Offers measurement at specific wavelengths: 3.3 um or 5.2 um.
- Includes embedded ECAT and Ethernet protocols for system integration.
- Optimized hub-and-spoke architecture specifically for semiconductor chambers.
- Facilitates more accurate wafer-temperature measurement and real-time temperature control.
- Helps improve wafer-to-wafer repeatability and thermal uniformity.
- Remote Smart Sensors (RSS) can be installed directly on the chamber and operate at ambient temperatures up to 60°C.
Applications
- Lamp-heated Si and SiC thermal processes.
- Rapid thermal annealing (RTA).
- Epitaxial (Epi) growth.
- New and emerging semiconductor manufacturing processes.
- Semiconductor processing systems requiring precise temperature control.
- Mission-critical applications in semiconductor equipment.
Avaliablity
Advanced Energy’s Centra Smart Hub is now available as part of its portfolio of specialized temperature measurement solutions. The product is designed to support scalable, synchronized data acquisition through up to eight remote sensors, with built-in EtherCAT communication and flexible integration options.
