New Ultra-Sensitive Space Saving Optomechanical Ultrasound Sensor on a Silicon Photonic chip

Imec has announced the optomechanical ultrasound sensor on a silicon photonic chip that has an unprecedented sensitivity due to an innovative optomechanical waveguide. The high sensitivity waveguide of the 20-µm small sensor can detect two orders of magnitudes better than piezoelectric elements of identical size.

Designed based on a highly sensitive split-rib optomechanical waveguide fabricated using new CMOS-compatible processing, the new device can deliver sensitivity in two orders of magnitude larger than a state-of-the-art device. The new sensor has a low detection limit hence it can be used in clinical and biomedical applications of ultrasonic and photoacoustic imaging such as deep-tissue mammography and the study of vascularization or innervation of potential tumorous tissue.

The low detection limit of the device can improve the trade-off between imaging resolution and depth for ultrasound applications, and is crucial for photoacoustic imaging. This may also enable low-pressure applications like through-skull functional brain imaging, which suffers from the strong ultrasound attenuation of bone. The fine-pitched (30 µm) matrix of these tiny (20 µm) sensors can be easily integrated on-chip with photonic multiplexers.

Features of Optomechanical Ultrasound Sensor

• Unprecedented sensitivity
• The small size of 20µm
• Fine-pitched (30 µm) matrix
• Detect two orders of magnitudes
• Low detection limit
• Designed based on a highly sensitive split-rib optomechanical waveguide

Note: More technical information can be found on the research page of optomechanical ultrasound sensors in silicon photonics.